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Marcus Nanotechnology Building

Marcus Nanotechnology Building

Marcus Nanotechnology Building

Core facility: Marcus Nanotechnology Building (MNB) @ Georgia Tech

The Marcus Nanotechnology Building (MNB) is now the headquarters for the Institute of Electronics and Nanotechnology (IEN), one of Georgia Tech's several new Interdisciplinary Research Institutes (IRI). In addition to being the headquarters for the IEN, the building houses the largest cleanroom laboratory dedicated to the fabrication, characterization, and assembly of biomedical and semiconductor devices in the Southeast United States.


Location    345 Ferst Dr NW, Atlanta, GA 30318

List            Marcus Nanotechnology Equipment

Rates         Equipment and Cleanroom


  • ALD1
  • ALD2
  • Biacore T200 SPR
  • Bioforce Nano eNabler Printer/Patterner
  • Black Magic PECVD
  • Cambridge NanoTech Plasma ALD - Metal (left)
  • Cambridge NanoTech Plasma ALD - Oxide (right)
  • CHA E-beam Evaporator 1 (dielectrics)
  • CHA E-beam Evaporator 2 (metals)
  • Contact Angle Measurement System
  • CVD FirstNano SiGe Nanowire Furnace
  • Denton Discovery - RF/DC Sputterer
  • Denton Explorer - E-beam Evaporator
  • Hitachi S-3700N VP-SEM
  • Hitachi S-4700 FE-SEM
  • Karl Suss SB6 Bonder
  • Malvern Zetasizer
  • Oxford Cryogenic ICP
  • Oxford End-point RIE
  • Oxford ICP PECVD
  • PVD75 Filament Evaporator
  • PVD75 RF Sputterer
  • Q-sense QCM-D
  • Unifilm Sputterer
  • Vision RIE 2
  • Wyko Profilometer NT3300
  • Xactix Xenon Difluoride Etcher